ULTIC ARMOR

ULTIC ARMOR
High Performance FKM
UA
ULTIC ARMOR is a high performance FKM applicable to both static and dynamic applications. Its purity, plasma resistance, and low adhesion allow it for use in CVD, Etch and Ashing processes. The ULTIC ARMOR is also available as a specifically engineered bonded gate.
- All CVD Applications
- Dry Etch Equipment
- Plasma Ashing Equipment
Typical Properties
ColorTranslucent Amber
Hardness(Shore A)70
Tensile Strength (MPa)13.9
Elongation(%)220
Modulus 100% Elongation (MPa)2.9
Maximum Temperature (℃)200
Minimum Temperature (℃)-5
Compression Set (%)27
Cool Set (%)32
URLULTIC ARMOR