ULTIC ARMOR |
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High Performance FKM |
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ULTIC ARMOR is a high performance FKM applicable to both static and dynamic applications. Its purity, plasma resistance, and low adhesion allow it for use in CVD, Etch and Ashing processes. The ULTIC ARMOR is also available as a specifically engineered bonded gate. |
- All CVD Applications - Dry Etch Equipment - Plasma Ashing Equipment |
Color | Translucent Amber |
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Hardness(Shore A) | 70 |
Tensile Strength (MPa) | 13.9 |
Elongation(%) | 220 |
Modulus 100% Elongation (MPa) | 2.9 |
Maximum Temperature (℃) | 200 |
Minimum Temperature (℃) | -5 |
Compression Set (%) | 27 |
Cool Set (%) | 32 |
URL | ULTIC ARMOR |