| SILTY ARMOR |
|---|
| Enhanced Silicone |
 |
| SILTY ARMOR is Valqua’s lowest temperature grade Special silicone material for semiconductor equipment. It has very good low-temperature characteristics and can be used in low-temperature regions down to -115°C and also has excellent purity. |
| - Dry Etch Equipment - Low Temperature Environment |
| Color | Dark Blue |
|---|---|
| Hardness(Shore A) | 63 |
| Tensile Strength (MPa) | 11.2 |
| Elongation(%) | 630 |
| Modulus 100% Elongation (MPa) | 1.4 |
| Maximum Temperature (℃) | 150 |
| Minimum Temperature (℃) | -115 |
| Compression Set (%) | 29(150C*72h) |
| Cool Set (%) | 24 |
| URL | SILTY ARMOR |