SPOQ ARMOR

SPOQ ARMOR
High Performance FKM
SA
SPOQ ARMOR is a high performance FKM material recommended for static/dynamic locations. Its plasma resistance, low adhesion to quartz make the SPOQ ARMOR suitable for CVD, Etch and Ashing applications.
- Dry Etch Equipment
- Plasma Enhanced CVD Equipment
- Plasma Ashing Equipment
Typical Properties
ColorWhite
Hardness(Shore A)71
Tensile Strength (MPa)14
Elongation(%)240
Modulus 100% Elongation (MPa)3
Maximum Temperature (℃)200
Minimum Temperature (℃)-5
Compression Set (%)33
Cool Set (%)40
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