| SPOQ ARMOR |
|---|
| High Performance FKM |
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| SPOQ ARMOR is a high performance FKM material recommended for static/dynamic locations. Its plasma resistance, low adhesion to quartz make the SPOQ ARMOR suitable for CVD, Etch and Ashing applications. |
| - Dry Etch Equipment - Plasma Enhanced CVD Equipment - Plasma Ashing Equipment |
| Color | White |
|---|---|
| Hardness(Shore A) | 71 |
| Tensile Strength (MPa) | 14 |
| Elongation(%) | 240 |
| Modulus 100% Elongation (MPa) | 3 |
| Maximum Temperature (℃) | 200 |
| Minimum Temperature (℃) | -5 |
| Compression Set (%) | 33 |
| Cool Set (%) | 40 |
| URL | SPOQ ARMOR |