| FLUORITZ-PLUS |
|---|
| FFKM |
 |
| FLUORITZ-PLUS is VALQUA’s highest purity FFKM material with improved plasma weight loss resistance. It may be used for dry etching/ashing and CVD equipment for Semiconductor and Display processing equipment. |
| - Plasma Enhanced CVD Equipment - Dry Etch Equipment - Plasma Ashing Equipment - Other Plasma Equipment |
| Color | Brown |
|---|---|
| Hardness(Shore A) | 67 |
| Tensile Strength (MPa) | 9 |
| Elongation(%) | 300 |
| Modulus 100% Elongation (MPa) | 2.2 |
| Maximum Temperature (℃) | 300 |
| Minimum Temperature (℃) | 0 |
| Compression Set (%) | 18 |
| Cool Set (%) | 59 |
| URL | FLUORITZ-PLUS |