| FLUORITZ-OR |
|---|
| FFKM |
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| FLUORITZ‐OR is a high purity, low particle, low outgassing material that improves upon radical and ozone resistance. Especially suited for cleaning environments with NF3 gas + remote plasma source and ozone processes, expect FLUORITZ‐OR to extend seal life while reducing particle generation. |
| - Plasma Etch / CVD / ALD / Remote Plasma Clean -Chamber lid, isolation valve, gate (bonded option available), etc |
| Color | Black |
|---|---|
| Hardness(Shore A) | 82 |
| Tensile Strength (MPa) | 16.3 |
| Elongation(%) | 173 |
| Modulus 100% Elongation (MPa) | 8.4 |
| Maximum Temperature (℃) | 260 |
| Minimum Temperature (℃) | 0 |
| Compression Set (%) | 19 |
| Cool Set (%) | 73 |
| URL | FLUORITZ-OR |