FLUORITZ-OR

FLUORITZ-OR
FFKM
OR
FLUORITZ‐OR is a high purity, low particle, low outgassing material that improves upon radical and ozone resistance. Especially suited for cleaning environments with NF3 gas + remote plasma source and ozone processes, expect FLUORITZ‐OR to extend seal life while reducing particle generation.
- Plasma Etch / CVD / ALD / Remote Plasma Clean
-Chamber lid, isolation valve, gate (bonded option available), etc
Typical Properties
ColorBlack
Hardness(Shore A)82
Tensile Strength (MPa)16.3
Elongation(%)173
Modulus 100% Elongation (MPa)8.4
Maximum Temperature (℃)260
Minimum Temperature (℃)0
Compression Set (%)19
Cool Set (%)73
URLFLUORITZ-OR