LABE ARMOR |
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Enhanced Silicone |
LABE ARMOR is Valqua’s enhanced fluoro-silicone O-Ring. Its low adhesion to quartz and O2 plasma resistance makes it suitable for static locations in ashing and etching equipment. Excellent in low temperature and oil resistance. Applicable to Fluorine based cooling media, where ARCURY AD, ARCURY AL, FLUORITZ-SB may not be suitable. |
- Seals for Plasma Equipment - Plasma Ashing Equipment - Chillers and Other Cooling Equipment |
Color | Blue |
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Hardness(Shore A) | 75 |
Tensile Strength (MPa) | 8.8 |
Elongation(%) | 220 |
Modulus 100% Elongation (MPa) | 4.3 |
Maximum Temperature (℃) | 200 |
Minimum Temperature (℃) | -65 |
Compression Set (%) | 48 |
Cool Set (%) | 17 |
URL | LABE ARMOR |