| HYREC ARMOR |
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| High Performance FKM |
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| HYREC ARMOR is a softer FKM suited for static seal locations, with excellent purity and improved radical resistance compared to the conventional FKM. It may be used for dry etch, ashing, CVD processes. |
| - Dry Etch Equipment - Plasma Enhanced CVD Equipment - Plasma Ashing Equipment |
| Color | Deep Transparent Amber |
|---|---|
| Hardness(Shore A) | 58 |
| Tensile Strength (MPa) | 13 |
| Elongation(%) | 440 |
| Modulus 100% Elongation (MPa) | 1.2 |
| Maximum Temperature (℃) | 200 |
| Minimum Temperature (℃) | -5 |
| Compression Set (%) | 38 |
| Cool Set (%) | 23 |
| URL | HYREC ARMOR |