DC156

DC156
High Performance FKM
DC156
DC156 has excellent properties in terms of crack resistance upon radical exposure and weight loss. Its excellent adhesion properties and cleanness make the DC156 suitable for static applications in CVD and Etching/Ashing processes.
- Dry Etch Equipment
- Plasma Enhanced CVD Equipment
- Plasma Ashing Equipment
Typical Properties
ColorMidnight Blue
Hardness(Shore A)58
Tensile Strength (MPa)13.2
Elongation(%)250
Modulus 100% Elongation (MPa)1.7
Maximum Temperature (℃)200
Minimum Temperature (℃)-5
Compression Set (%)22
Cool Set (%)20
URLDC156