ARMOR CRYSTAL 70 |
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High Performance FKM |
ARMOR CRYSTAL is a very high purity FKM material for improved adhesion to metals and radical resistance compared to the conventional FKM. It may be used for dry etching/ashing and CVD equipment for Semiconductor and LCD equipment. |
- Plasma Enhanced CVD Equipment - Dry Etch Equipment - Plasma Ashing Equipment - Seals for Plasma Equipment |
Color | Transparent Light Amber |
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Hardness(Shore A) | 70 |
Tensile Strength (MPa) | 19 |
Elongation(%) | 510 |
Modulus 100% Elongation (MPa) | 1.8 |
Maximum Temperature (℃) | 150 |
Minimum Temperature (℃) | -5 |
Compression Set (%) | |
Cool Set (%) | 57 |
URL | ARMOR CRYSTAL 70 |