ARMOR CRYSTAL 70

ARMOR CRYSTAL 70
High Performance FKM
AC70
ARMOR CRYSTAL is a very high purity FKM material for improved adhesion to metals and radical resistance compared to the conventional FKM. It may be used for dry etching/ashing and CVD equipment for Semiconductor and LCD equipment.
- Plasma Enhanced CVD Equipment
- Dry Etch Equipment
- Plasma Ashing Equipment
- Seals for Plasma Equipment
Typical Properties
ColorTransparent Light Amber
Hardness(Shore A)70
Tensile Strength (MPa)19
Elongation(%)510
Modulus 100% Elongation (MPa)1.8
Maximum Temperature (℃)150
Minimum Temperature (℃)-5
Compression Set (%)
Cool Set (%)57
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