ARMOR CRYSTAL 60

ARMOR CRYSTAL 60
High Performance FKM
AC60
ARMOR CRYSTAL is a very high purity FKM material for improved adhesion to metals and radical resistance compared to the conventional FKM. It may be used for dry etching/ashing and CVD equipment for Semiconductor and LCD equipment.
- Plasma Enhanced CVD Equipment
- Dry Etch Equipment
- Plasma Ashing Equipment
- Seals for Plasma Equipment
Typical Properties
ColorTransparent Light Amber
Hardness(Shore A)60
Tensile Strength (MPa)17
Elongation(%)580
Modulus 100% Elongation (MPa)1.7
Maximum Temperature (℃)150
Minimum Temperature (℃)-5
Compression Set (%)
Cool Set (%)60
URLARMOR CRYSTAL 60